Invention Grant
- Patent Title: Numerical aperture (NA) controlling unit, variable optical probe including the NA controlling unit, and depth scanning method using the NA controlling unit
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Application No.: US13615048Application Date: 2012-09-13
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Publication No.: US09629552B2Publication Date: 2017-04-25
- Inventor: Min-seog Choi , Seung-wan Lee , Woon-bae Kim , Eun-sung Lee , Kyu-dong Jung , Jong-hyeon Chang
- Applicant: Min-seog Choi , Seung-wan Lee , Woon-bae Kim , Eun-sung Lee , Kyu-dong Jung , Jong-hyeon Chang
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2011-0093647 20110916
- Main IPC: A61B5/05
- IPC: A61B5/05 ; A61B5/00 ; G01B9/02 ; G02B5/00 ; G02B21/00 ; G02B26/00 ; G02B26/10 ; G01B11/22 ; G02B3/14

Abstract:
A numerical aperture (NA) controlling unit and a variable optical probe including the same are provided. The NA controlling unit includes: an aperture adjustment unit which controls an aperture through which light is transmitted; and a focus control unit that is disposed in a predetermined position with respect to the aperture adjustment unit, that focuses light transmitted through the aperture, and that has an adjustable focal length. The variable optical probe includes: a light transmission unit; a collimator that collimates light transmitted through the light transmission unit into parallel light; an NA controlling unit that focuses light on a sample to be inspected; and a scanner that varies a path of light transmitted through the light transmission unit such that a predetermined region of the sample is scanned by light that passes through the NA controlling unit.
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