Invention Grant
- Patent Title: MEMS switch
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Application No.: US14208012Application Date: 2014-03-13
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Publication No.: US09634231B2Publication Date: 2017-04-25
- Inventor: Osamu Toyoda , Takeaki Shimanouchi
- Applicant: FUJITSU LIMITED
- Applicant Address: JP Kawasaki
- Assignee: FUJITSU LIMITED
- Current Assignee: FUJITSU LIMITED
- Current Assignee Address: JP Kawasaki
- Agency: Kratz, Quintos & Hanson, LLP
- Main IPC: H01H57/00
- IPC: H01H57/00 ; H01L41/09 ; B81C1/00

Abstract:
A MEMS switch has fixed support, a plate-shaped flexible beam having at least one end immovably supported by the fixed support and having an extending movable surface, a movable electric contact disposed on the movable surface of the flexible beam, a fixed electric contact facing the movable electric contact and disposed at a fixed position relative to the fixed support, first piezoelectric driver disposed above the movable surface of the flexible beam, extending from a portion above the fixed support towards the movable electric contact, and capable of displacing the movable electric contact towards the fixed electric contact by voltage driving, and second piezoelectric driver disposed at least on the movable surface of the flexible beam and capable of so driving a movable part of the flexible beam by voltage driving that the movable electric contact is separated from the fixed electric contact.
Public/Granted literature
- US20140191616A1 MEMS SWITCH Public/Granted day:2014-07-10
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