- 专利标题: Vertical memory device with gate lines at the same level connected
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申请号: US14534181申请日: 2014-11-06
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公开(公告)号: US09640549B2公开(公告)日: 2017-05-02
- 发明人: Seok-Won Lee , Joon-Hee Lee , Dong-Seog Eun , Chang-Hyun Lee
- 申请人: Seok-Won Lee , Joon-Hee Lee , Dong-Seog Eun , Chang-Hyun Lee
- 申请人地址: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- 代理机构: Muir Patent Law, PLLC
- 优先权: KR10-2013-0140354 20131119
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L27/11582 ; H01L27/11556 ; G11C5/06 ; H01L27/11548 ; H01L27/11575 ; G11C8/14 ; H01L29/66 ; H01L29/788 ; H01L29/792
摘要:
A vertical memory device includes a substrate, a channel, gate lines and a connecting portion. A plurality of the channels extend in a first direction which is vertical to a top surface of a substrate. A plurality of the gate lines are stacked in the first direction to be spaced apart from each other and extend in a second, lengthwise direction, each gate line intersecting a set of channels and surrounding outer sidewalls of each channel of the set of channels. The gate lines forms a stepped structure which includes a plurality of vertical levels. A connecting portion connects a group of gate lines of the plurality of gate lines located at the same vertical level, the connecting portion diverging from the second direction in which the gate lines of the group of gate lines extend.
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