- Patent Title: Vertical memory device with gate lines at the same level connected
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Application No.: US14534181Application Date: 2014-11-06
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Publication No.: US09640549B2Publication Date: 2017-05-02
- Inventor: Seok-Won Lee , Joon-Hee Lee , Dong-Seog Eun , Chang-Hyun Lee
- Applicant: Seok-Won Lee , Joon-Hee Lee , Dong-Seog Eun , Chang-Hyun Lee
- Applicant Address: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2013-0140354 20131119
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L27/11582 ; H01L27/11556 ; G11C5/06 ; H01L27/11548 ; H01L27/11575 ; G11C8/14 ; H01L29/66 ; H01L29/788 ; H01L29/792

Abstract:
A vertical memory device includes a substrate, a channel, gate lines and a connecting portion. A plurality of the channels extend in a first direction which is vertical to a top surface of a substrate. A plurality of the gate lines are stacked in the first direction to be spaced apart from each other and extend in a second, lengthwise direction, each gate line intersecting a set of channels and surrounding outer sidewalls of each channel of the set of channels. The gate lines forms a stepped structure which includes a plurality of vertical levels. A connecting portion connects a group of gate lines of the plurality of gate lines located at the same vertical level, the connecting portion diverging from the second direction in which the gate lines of the group of gate lines extend.
Public/Granted literature
- US20150137216A1 VERTICAL MEMORY DEVICES AND METHODS OF MANUFACTURING THE SAME Public/Granted day:2015-05-21
Information query
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