Invention Grant
- Patent Title: EUV light generator apparatus having a droplet generator configured to control a droplet position using a magnetic field
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Application No.: US15064942Application Date: 2016-03-09
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Publication No.: US09642234B2Publication Date: 2017-05-02
- Inventor: Seungkoo Lee , Insung Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: KR10-2015-0113388 20150811
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G02B19/00
Abstract:
Described is an extreme ultraviolet (EUV) light generator apparatus. The EUV light generator apparatus includes a droplet nozzle, a central electromagnet including a central coil wound around the droplet nozzle, and a droplet generator including side electromagnets around the central electromagnet.
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