Invention Grant
- Patent Title: Mask assembly and thin film deposition method using the same
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Application No.: US14029833Application Date: 2013-09-18
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Publication No.: US09644256B2Publication Date: 2017-05-09
- Inventor: Jung Woo Ko
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin, Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2013-0053852 20130513
- Main IPC: H01L51/50
- IPC: H01L51/50 ; H01L51/56 ; C23C14/04

Abstract:
A mask assembly and a thin film deposition method using the same are provided.The mask assembly includes a mask frame including first to fourth sides. The first to fourth sides form a rectangle. Inner sides of the rectangle define a window. The mask frame has a plurality of substrate seating portions provided to project toward the window from at least two corners. The two corners face each other in a diagonal direction. The mask assembly includes four corners positioned where the first to fourth sides of the mask assembly meet each other. A mask includes a plurality of openings for deposition. The plurality of openings are arranged to correspond to the window.
Public/Granted literature
- US20140335688A1 MASK ASSEMBLY AND THIN FILM DEPOSITION METHOD USING THE SAME Public/Granted day:2014-11-13
Information query
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