Invention Grant
- Patent Title: Low contact resistance thin film transistor
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Application No.: US15036662Application Date: 2014-11-13
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Publication No.: US09647133B2Publication Date: 2017-05-09
- Inventor: Duy Vu Pham , Kuo Hui Su
- Applicant: Duy Vu Pham , Kuo Hui Su
- Applicant Address: DE Essen
- Assignee: Evonik Degussa GmbH
- Current Assignee: Evonik Degussa GmbH
- Current Assignee Address: DE Essen
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: EP13193037 20131115
- International Application: PCT/EP2014/074447 WO 20141113
- International Announcement: WO2015/071344 WO 20150521
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L29/786 ; H01L29/417 ; H01L29/45 ; H01L21/02 ; H01L23/31 ; H01L27/12 ; H01L29/66

Abstract:
The present invention relates to a novel thin film transistor (TFT) comprising a substrate (100) with a gate electrode layer (101) deposited and patterned thereon and a gate insulator layer (102) deposited on the gate electrode layer and the substrate, characterized in that the transistor further comprises (i) a carrier injection layer (103) arranged above the gate insulator layer, (ii) a source/drain (S/D) electrode layer (104) deposited on the carrier injection layer, and (iii) a semiconductor layer (106), methods for the production of such novel TFTs, devices comprising such TFTs, and to the use of such TFTs.
Public/Granted literature
- US20160284853A1 LOW CONTACT RESISTANCE THIN FILM TRANSISTOR Public/Granted day:2016-09-29
Information query
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