Invention Grant
- Patent Title: Speckle reduction method and apparatus
-
Application No.: US13905038Application Date: 2013-05-29
-
Publication No.: US09651419B2Publication Date: 2017-05-16
- Inventor: Noam Babayoff , Yossef Atiya , Tzvi Philipp
- Applicant: ALIGN TECHNOLOGY, INC.
- Applicant Address: US CA San Jose
- Assignee: ALIGN TECHNOLOGY, INC.
- Current Assignee: ALIGN TECHNOLOGY, INC.
- Current Assignee Address: US CA San Jose
- Agency: Wilson Sonsini Goodrich & Rosati
- Main IPC: G02B27/48
- IPC: G02B27/48 ; G01J1/04 ; G02B21/00 ; G03H1/32

Abstract:
An apparatus adapted for confocal imaging of a non-flat specimen comprising a coherent light source for producing a light beam, imaging optics adapted to focus the light beam into at least one spot on a surface of a specimen, and a detector adapted to receive and detect light reflected from the specimen surface. The imaging optics comprise at least one optical component located so that the light reflected from the specimen surface passes therethrough on its way to the detector. The optical component is movable so as to move the at least one spot, within a range of movement, to a number of distinct locations in a plane perpendicular to the apparatus' optical axis, within the detector's integration time.
Public/Granted literature
- US20130256517A1 SPECKLE REDUCTION METHOD AND APPARATUS Public/Granted day:2013-10-03
Information query