公开(公告)号：US09651419B2

公开(公告)日：2017-05-16

申请号：US13905038

申请日：2013-05-29

Applicant: ALIGN TECHNOLOGY, INC.

Inventor： Noam Babayoff ,  Yossef Atiya ,  Tzvi Philipp

IPC: G02B27/48 ,  G01J1/04 ,  G02B21/00 ,  G03H1/32

CPC classification number: G01J1/0448 ,  G02B21/0056 ,  G02B21/006 ,  G02B21/008 ,  G02B27/48 ,  G03H1/32

Abstract: An apparatus adapted for confocal imaging of a non-flat specimen comprising a coherent light source for producing a light beam, imaging optics adapted to focus the light beam into at least one spot on a surface of a specimen, and a detector adapted to receive and detect light reflected from the specimen surface. The imaging optics comprise at least one optical component located so that the light reflected from the specimen surface passes therethrough on its way to the detector. The optical component is movable so as to move the at least one spot, within a range of movement, to a number of distinct locations in a plane perpendicular to the apparatus' optical axis, within the detector's integration time.

公开(公告)号：US10514293B2

公开(公告)日：2019-12-24

申请号：US15483734

申请日：2017-04-10

Applicant: ALIGN TECHNOLOGY, INC.

Inventor： Noam Babayoff ,  Yossef Atiya ,  Tzvi Philipp

IPC: G01J1/04 ,  G02B21/00 ,  G02B27/48 ,  G03H1/32

Abstract: An apparatus adapted for confocal imaging of a non-flat specimen comprising a coherent light source for producing a light beam, imaging optics adapted to focus the light beam into at least one spot on a surface of a specimen, and a detector adapted to receive and detect light reflected from the specimen surface. The imaging optics comprise at least one optical component located so that the light reflected from the specimen surface passes therethrough on its way to the detector. The optical component is movable so as to move the at least one spot, within a range of movement, to a number of distinct locations in a plane perpendicular to the apparatus' optical axis, within the detector's integration time.

公开(公告)号：US20170211972A1

公开(公告)日：2017-07-27

申请号：US15483734

申请日：2017-04-10

Applicant: ALIGN TECHNOLOGY, INC.

Inventor： Noam Babayoff ,  Yossef Atiya ,  Tzvi Philipp

IPC: G01J1/04 ,  G02B27/48 ,  G02B21/00

Abstract: An apparatus adapted for confocal imaging of a non-flat specimen comprising a coherent light source for producing a light beam, imaging optics adapted to focus the light beam into at least one spot on a surface of a specimen, and a detector adapted to receive and detect light reflected from the specimen surface. The imaging optics comprise at least one optical component located so that the light reflected from the specimen surface passes therethrough on its way to the detector. The optical component is movable so as to move the at least one spot, within a range of movement, to a number of distinct locations in a plane perpendicular to the apparatus' optical axis, within the detector's integration time.