Invention Grant
- Patent Title: MEMS device
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Application No.: US14654465Application Date: 2012-12-20
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Publication No.: US09651775B2Publication Date: 2017-05-16
- Inventor: Julien Gamet , Faouzi Khechana
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- International Application: PCT/EP2012/076259 WO 20121220
- International Announcement: WO2014/094850 WO 20140626
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10 ; G02B7/00

Abstract:
A MEMS micro-mirror device comprising, a MEMS micro-mirror, a support structure and, a first and second torsional arm which each connect the MEMS micro-mirror to the support structure, wherein the first and second torsional arms are arranged to define a first oscillation axis about which the MEMS micro-mirror can oscillate; a single actuation coil for oscillating the MEMS micro mirror about the first oscillation axis, at least a portion of the single actuation coil being arranged to cooperate with the MEMS micro mirror; a magnet which is arranged such that a magnetic field generated by the magnet submerges at least the portion of the single actuation coil which cooperates with the MEMS micro mirror; wherein the single actuation coil is configured to extend along the first and second torsional arms.
Public/Granted literature
- US20150338645A1 A MEMS DEVICE Public/Granted day:2015-11-26
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