Invention Grant
- Patent Title: Bipolar junction transistors with an air gap in the shallow trench isolation
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Application No.: US14958345Application Date: 2015-12-03
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Publication No.: US09653566B2Publication Date: 2017-05-16
- Inventor: Renata Camillo-Castillo , Vibhor Jain , Vikas K. Kaushal , Marwan H. Khater , Anthony K. Stamper
- Applicant: GLOBALFOUNDRIES Inc
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/737 ; H01L29/08 ; H01L29/10 ; H01L29/06

Abstract:
Device structures, fabrication methods, and design structures for a bipolar junction transistor. A trench isolation region is formed in a substrate. The trench isolation region is coextensive with a collector in the substrate. A base layer is formed on the collector and on a first portion of the trench isolation region. A dielectric layer is formed on the base layer and on a second portion of the trench isolation region peripheral to the base layer. After the dielectric layer is formed, the trench isolation region is at least partially removed to define an air gap beneath the dielectric layer and the base layer.
Public/Granted literature
- US20160087073A1 BIPOLAR JUNCTION TRANSISTORS WITH AN AIR GAP IN THE SHALLOW TRENCH ISOLATION Public/Granted day:2016-03-24
Information query
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