发明授权
- 专利标题： System for viewing samples that are undergoing ellipsometric investigation in real time
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申请号： US14544706申请日： 2015-02-06
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公开(公告)号： US09658151B2公开(公告)日： 2017-05-23
- 发明人: Martin M. Liphardt , Galen L. Pfeiffer
- 申请人： Martin M. Liphardt , Galen L. Pfeiffer
- 申请人地址： US NE Lincoln
- 专利权人： J.A. WOOLLAM CO., INC.
- 当前专利权人： J.A. WOOLLAM CO., INC.
- 当前专利权人地址： US NE Lincoln
- 代理商 James D. Welch
- 主分类号： G01N21/21
- IPC分类号： G01N21/21 ; H04N5/232 ; G01N21/55
摘要：
In the context of an ellipsometer or the like, positioning a camera other than directly above a sample being investigated by an electromagnetic beam, while said camera provides an optical view of a surface of said sample which is in focus over the entire viewed extent of the sample, and wherein a contrast improving system involving two beams provided by a beam splitting system is utilized.
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