A microelectronic sensor device for the detection of target components with label or magnetic particles includes a carrier with a binding surface at which target components can collect and optionally bind to specific capture elements. An input light beam is transmitted into the carrier and totally internally reflected at the binding surface. The amount of light in the output light beam is detected by a light detector. Evanescent light generated during the total internal reflection is affected by target components and/or label particles at the binding surface and will be missing in the output light beam. This is used to determine the amount of target components at the binding surface from the amount of light in the output light beam. A magnetic field generator is optionally used to generate a magnetic field at the binding surface by which magnetic label particles can be manipulated, such as attracted or repelled.