Invention Grant
- Patent Title: MEMS device with constant capacitance
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Application No.: US14182839Application Date: 2014-02-18
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Publication No.: US09659717B2Publication Date: 2017-05-23
- Inventor: Check F. Lee , Raymond C. Goggin , Padraig L. Fitzgerald
- Applicant: Analog Devices Global
- Applicant Address: BM Hamilton
- Assignee: Analog Devices Global
- Current Assignee: Analog Devices Global
- Current Assignee Address: BM Hamilton
- Agency: Sunstein Kann Murphy & Timbers LLP
- Main IPC: H01L41/09
- IPC: H01L41/09 ; B81B7/04 ; H01H1/00 ; B81B7/00 ; B81C1/00 ; H01H59/00 ; H01P1/12

Abstract:
A MEMS apparatus has a substrate, an input node, an output node, and a MEMS switch between the input node and the output node. The switch selectively connects the input node and the output node, which are electrically isolated when the switch is open. The apparatus also has an input doped region in the substrate and an output doped region in the substrate. The input doped region and output doped region are electrically isolated through the substrate—i.e., the resistance between them inhibits non-negligible current flows between the two doped regions. The input doped region forms an input capacitance with the input node, while the output doped region forms an output capacitance with the output node.
Public/Granted literature
- US20150235779A1 MEMS Device with Constant Capacitance Public/Granted day:2015-08-20
Information query
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