- 专利标题: Coils utilized in vapor deposition applications and methods of production
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申请号: US11086022申请日: 2005-03-22
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公开(公告)号: US09659758B2公开(公告)日: 2017-05-23
- 发明人: Eal Lee , Nicole Truong , Robert Prater , Norm Sand
- 申请人: Eal Lee , Nicole Truong , Robert Prater , Norm Sand
- 申请人地址: US NJ Morris Plains
- 专利权人: Honeywell International Inc.
- 当前专利权人: Honeywell International Inc.
- 当前专利权人地址: US NJ Morris Plains
- 代理机构: Faegre Baker Daniels LLP
- 主分类号: C23C14/34
- IPC分类号: C23C14/34 ; H01J37/34 ; H01J37/32 ; C23C14/56
摘要:
A coil assembly for utilization in a vapor deposition system is described herein that includes at least one subject coil having a length, a height, an inside edge, an outside edge and a thickness, wherein the thickness of the subject coil is measured as the distance between the inside edge and the outside edge and wherein at least part of the thickness of the subject coil is reduced by at least 20% as compared to a reference coil. A coil assembly is also described herein for utilization in a vapor deposition system that includes at least one subject coil having a length, a height, an inside edge, an outside edge, and a thickness, wherein the thickness of the subject coil is measured as the distance between the inside edge and the outside edge and wherein at least part of the height of at least part of the subject coil is reduced by at least 20% as compared to the height of a reference coil.
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