- 专利标题: Method of controlled crack propagation for material cleavage using electromagnetic forces
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申请号: US14469983申请日: 2014-08-27
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公开(公告)号: US09659764B2公开(公告)日: 2017-05-23
- 发明人: Andrei T. Iancu , Friedrich B. Prinz
- 申请人: The Board of Trustees of the Leland Stanford Junior University
- 申请人地址: US CA Palo Alto
- 专利权人: The Board of Trustees of the Leland Stanford Junior University
- 当前专利权人: The Board of Trustees of the Leland Stanford Junior University
- 当前专利权人地址: US CA Palo Alto
- 代理机构: Lumen Patent Firm
- 主分类号: B26F3/00
- IPC分类号: B26F3/00 ; H01L21/02 ; B28D5/00 ; H01L21/306
摘要:
To address the needs in the art, a method of cleaving substrate material that includes forming an initial crack in a bulk substrate material, where the crack is aligned along a cleaving plane of the bulk substrate material, aligning the cleaving plane between two parallel electrodes in a controlled environment, wherein the parallel electrodes include a top electrode and a bottom electrode, where the cleaving plane is parallel with the two parallel electrodes, where a bottom portion of the bulk substrate material is physically and electrically connected to the bottom electrode, and applying a voltage across the two parallel electrodes, where the voltage is at least 50 kV and establishes a uniform electromagnetic force on the top surface of the bulk substrate material, where the electromagnetic force is capable of inducing crack propagation along the cleaving plane and separating a cleaved substrate material from the bulk substrate material.
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