Invention Grant
- Patent Title: Method for manufacturing display device and method for manufacturing electronic device
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Application No.: US15163072Application Date: 2016-05-24
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Publication No.: US09660006B2Publication Date: 2017-05-23
- Inventor: Minato Ito , Yasuhiro Jinbo
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: JPJAPAN2015-108191 20150528
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L27/32 ; H01L51/00

Abstract:
A method for manufacturing a display device, which does not easily damage an electrode, is provided. In the first step, a terminal electrode, a wiring, and a functional layer are provided over a first substrate; the terminal electrode, the wiring, and the functional layer are electrically connected to one another; an insulating layer is provided over the terminal electrode; a first layer is provided over the terminal electrode and the insulating layer; an adhesive layer is sandwiched between the first substrate and a second substrate; the second substrate and the adhesive layer include a first opening overlapping with part of the first layer; and the insulating layer includes a second opening inside the first opening in a top view. In the second step, part of the first layer is removed by emitting particles having a high sublimation property to the first layer, so that the terminal electrode is exposed.
Public/Granted literature
- US09812517B2 Method for manufacturing display device and method for manufacturing electronic device Public/Granted day:2017-11-07
Information query
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