Invention Grant
- Patent Title: Thin films having large temperature coefficient of resistance and methods of fabricating same
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Application No.: US13687445Application Date: 2012-11-28
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Publication No.: US09664572B2Publication Date: 2017-05-30
- Inventor: Wei Tian , Declan Macken , Huaqing Yin , Venkateswara Rao Inturi , Eric Walter Singleton
- Applicant: Seagate Technology LLC
- Applicant Address: US CA Cupertino
- Assignee: SEAGATE TECHNOLOGY LLC
- Current Assignee: SEAGATE TECHNOLOGY LLC
- Current Assignee Address: US CA Cupertino
- Agency: Hollingsworth Davis, LLC
- Main IPC: G01K7/22
- IPC: G01K7/22 ; G01K7/16 ; C23C14/06 ; H01C7/00 ; H01C7/02 ; G11B5/60 ; H01C7/06

Abstract:
An apparatus comprises a head transducer and a resistive temperature sensor provided on the head transducer. The resistive temperature sensor comprises a first layer comprising a conductive material and having a temperature coefficient of resistance (TCR) and a second layer comprising at least one of a specular layer and a seed layer. A method is disclosed to fabricate such sensor with a laminated thin film structure to achieve a large TCR. The thicknesses of various layers in the laminated thin film are in the range of few to a few tens of nanometers. The combinations of the deliberately optimized multilayer thin film structures and the fabrication of such films at the elevated temperatures are disclosed to obtain the large TCR.
Public/Granted literature
- US20140146856A1 THIN FILMS HAVING LARGE TEMPERATURE COEFFICIENT OF RESISTANCE AND METHODS OF FABRICATING SAME Public/Granted day:2014-05-29
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