- 专利标题： Electrostatic quadrupole deflector for microcolumn
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申请号： US14631330申请日： 2015-02-25
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公开(公告)号： US09666407B2公开(公告)日： 2017-05-30
- 发明人: Tae Sik Oh , Ho Seob Kim , Dae Wook Kim
- 申请人： Tae Sik Oh , Ho Seob Kim , Dae Wook Kim
- 申请人地址： KR Asan-si, Chungcheongnam-Do
- 专利权人： INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SUNMOON UNIVERSITY
- 当前专利权人： INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SUNMOON UNIVERSITY
- 当前专利权人地址： KR Asan-si, Chungcheongnam-Do
- 代理机构： Park Law Firm
- 代理商 John K. Park
- 主分类号： H01J37/147
- IPC分类号： H01J37/147 ; H01J37/073 ; H01J37/26 ; H01J9/02
摘要：
Disclosed is an electrostatic quadrupole deflector for a microcolumn. The deflector includes an electron beam passage hole, deflecting electrodes to which a deflection voltage is applied, and floating electrodes to which the deflection voltage is not applied. The deflector is structurally stable and has a simple driving system. The deflector has good performance and characteristics.
公开/授权文献
- US20160247659A1 Electrostatic Quadrupole Deflector for Microcolumn 公开/授权日：2016-08-25
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