Invention Grant
- Patent Title: Volume wave resonators on micromachined vertical structures
-
Application No.: US14349347Application Date: 2012-10-05
-
Publication No.: US09666786B2Publication Date: 2017-05-30
- Inventor: Sylvain Ballandras , Gwenn Ulliac , Blandine Edouard-Guichardaz , Thomas Baron , Jean-Yves Rauch
- Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (C.N.R.S.) , UNIVERSITE DE FRANCHE-COMTE , ECOLE NATIONALE SUPERIEURE DE MECANIQUE ET DES MICROTECHNIQUES
- Applicant Address: FR Paris FR Besancon FR Besancon
- Assignee: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE,UNIVERSITE DE FRANCHE-COMTE,ECOLE NATIONALE SUPERIEURE DE MECANIQUE ET DES MICROTECHNIQUES
- Current Assignee: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE,UNIVERSITE DE FRANCHE-COMTE,ECOLE NATIONALE SUPERIEURE DE MECANIQUE ET DES MICROTECHNIQUES
- Current Assignee Address: FR Paris FR Besancon FR Besancon
- Agency: Young & Thompson
- Priority: FR1158964 20111005
- International Application: PCT/EP2012/069726 WO 20121005
- International Announcement: WO2013/050533 WO 20130411
- Main IPC: H01L41/08
- IPC: H01L41/08 ; H03H9/02 ; H03H3/04 ; H03H9/13 ; H03H9/17 ; H01L41/047 ; H01L41/18

Abstract:
A bulk wave piezoelectric resonator operating at a predetermined frequency includes a substrate block, having a plane face, a first thickness and consisting of a first material, a resonant plate having a length, width and second thickness, and consisting of a second piezoelectric material, first and second metal electrodes at least partly covering the resonant plate on each side and partly facing each other. The resonant plate is fixed perpendicularly in the vicinity of the plane face of the substrate block so that the width of the resonant plate and the first thickness of the substrate block have the same direction, and the first material, the second material, the first thickness of the block of substrate, the length, the width, the second thickness of the resonant plate are configured for trapping bulk waves at the operating frequency of the resonator and for producing a plane-plane type bulk wave piezoelectric resonator.
Public/Granted literature
- US20140246956A1 VOLUME WAVE RESONATORS ON MICROMACHINED VERTICAL STRUCTURES Public/Granted day:2014-09-04
Information query
IPC分类: