Invention Grant
- Patent Title: Pattern treatment methods
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Application No.: US15172246Application Date: 2016-06-03
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Publication No.: US09671697B2Publication Date: 2017-06-06
- Inventor: Huaxing Zhou , Mingqi Li , Vipul Jain , Jong Keun Park , Phillip D. Hustad , Jin Wuk Sung
- Applicant: Dow Global Technologies LLC , Rohm and Haas Electronic Materials LLC
- Applicant Address: US MI Midland US MA Marlborough
- Assignee: Dow Global Technologies LLC,Rohm and Haas Electronic Materials LLC
- Current Assignee: Dow Global Technologies LLC,Rohm and Haas Electronic Materials LLC
- Current Assignee Address: US MI Midland US MA Marlborough
- Agent Jonathan D. Baskin
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/11 ; G03F7/40 ; G03F7/00 ; G03F7/16 ; G03F7/20 ; C09D153/00 ; H01L21/027 ; C08F293/00 ; G03F7/039 ; G03F7/32

Abstract:
Pattern treatment methods comprise: (a) providing a semiconductor substrate comprising a patterned feature on a surface thereof; (b) applying a pattern treatment composition to the patterned feature, wherein the pattern treatment composition comprises a block copolymer and a solvent, wherein the block copolymer comprises a first block and a second block, wherein the first block comprises a unit formed from a first monomer comprising an ethylenically unsaturated polymerizable group and a hydrogen acceptor group, wherein the hydrogen acceptor group is a nitrogen-containing group, and the second block comprises a unit formed from a second monomer comprising an ethylenically unsaturated polymerizable group and a cyclic aliphatic group; and (c) rinsing residual pattern treatment composition from the substrate, leaving a portion of the block copolymer bonded to the patterned feature. The methods find particular applicability in the manufacture of semiconductor devices for providing high resolution patterns.
Public/Granted literature
- US20160357110A1 PATTERN TREATMENT METHODS Public/Granted day:2016-12-08
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