Invention Grant
- Patent Title: Arc management with voltage reversal and improved recovery
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Application No.: US15095745Application Date: 2016-04-11
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Publication No.: US09673028B2Publication Date: 2017-06-06
- Inventor: Hendrik Walde , Joshua Brian Pankratz , David Christie , Brian D. Kowal
- Applicant: Advanced Energy Industries, Inc.
- Applicant Address: US CO Fort Collins
- Assignee: ADVANCED ENERGY INDUSTRIES, INC.
- Current Assignee: ADVANCED ENERGY INDUSTRIES, INC.
- Current Assignee Address: US CO Fort Collins
- Agency: Neugeboren O'Dowd PC
- Main IPC: G05F1/00
- IPC: G05F1/00 ; H01J37/32 ; H05H1/24 ; H05H1/36 ; H05H1/48 ; H01J37/24 ; H01J37/244 ; H05H1/34

Abstract:
Systems and methods for arc handling in plasma processing operations are disclosed. The method includes providing current with a power supply to a plasma load at a first voltage polarity and energizing an energy storage device so when it is energized, the energy storage device applies a reverse polarity voltage that has a magnitude that is as least as great as the first voltage polarity. When an arc is detected, power is applied from the energy storage device to the plasma load with a reverse polarity voltage that has a polarity that is opposite of the first voltage polarity, the application of the reverse polarity voltage to the plasma load decreases a level of the current that is provided to the plasma load.
Public/Granted literature
- US20170025257A1 ARC MANAGEMENT WITH VOLTAGE REVERSAL AND IMPROVED RECOVERY Public/Granted day:2017-01-26
Information query
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