- 专利标题: Semiconductor devices including a gate core and a fin active core and methods of fabricating the same
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申请号: US14820860申请日: 2015-08-07
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公开(公告)号: US09673300B2公开(公告)日: 2017-06-06
- 发明人: Seungseok Ha , Keunhee Bai , Kyounghwan Yeo , Eunsil Park , Heonjong Shin
- 申请人: Seungseok Ha , Keunhee Bai , Kyounghwan Yeo , Eunsil Park , Heonjong Shin
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel, P.A.
- 优先权: KR10-2014-0140977 20141017
- 主分类号: H01L21/762
- IPC分类号: H01L21/762 ; H01L29/66
摘要:
Semiconductor devices and methods of fabricating the same are provided. The methods may include forming an isolation region defining a fin active region, forming a sacrificial field gate pattern on the isolation region and forming a sacrificial fin gate pattern on the fin active region. The method may also include forming a field gate cut zone comprising a first recess exposing a surface of the isolation region and a fin active cut zone comprising a second recess exposing a surface of the fin active region, forming a fin active recess in the second recess of the fin active cut zone and forming a field gate core and a fin active core by forming an insulation material in the first recess of the field gate cut zone and the fin active recess, respectively.
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