发明授权
- 专利标题: Memory device
-
申请号: US13357149申请日: 2012-01-24
-
公开(公告)号: US09673389B2公开(公告)日: 2017-06-06
- 发明人: Kenichi Murooka
- 申请人: Kenichi Murooka
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 主分类号: H01L27/24
- IPC分类号: H01L27/24 ; H01L45/00
摘要:
According to one embodiment, a memory device includes a first interconnect group, a second interconnect group, and a memory cell. In the first interconnect group, first interconnects are stacked. The first interconnect group includes first regions in which the first interconnects are formed along a first direction, and a second region in which first contact plugs are formed on the first interconnects. In the second region, the first interconnect group includes a step portion. Heights of adjacent terraces of the step portion are different from each other by the two or more first interconnects.
公开/授权文献
- US20130187118A1 MEMORY DEVICE 公开/授权日:2013-07-25
信息查询
IPC分类: