Invention Grant
- Patent Title: Sound transducer with interdigitated first and second sets of comb fingers
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Application No.: US15099758Application Date: 2016-04-15
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Publication No.: US09674627B2Publication Date: 2017-06-06
- Inventor: Shu-Ting Hsu , Alfons Dehe
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Main IPC: H04R3/00
- IPC: H04R3/00 ; H04R31/00 ; H04R1/02 ; H04R19/00 ; H04R19/01 ; H04R9/04

Abstract:
A sound transducer includes a substrate with a cavity with extending from a first surface of the substrate, a body at least partially covering the cavity and being connected to the substrate by at least one resilient hinge, a first set of comb fingers mounted to the substrate, and a second set of comb fingers mounted to the body. The first set of comb fingers and the second set of comb fingers are interdigitated and configured to create an electrostatic force driving the body in a direction perpendicular to the first surface of the substrate. The body and the at least one resilient hinge are configured for a resonant or a near-resonant excitation by the electrostatic force.
Public/Granted literature
- US20160234619A1 Sound Transducer with Interdigitated First and Second Sets of Comb Fingers Public/Granted day:2016-08-11
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