Invention Grant
- Patent Title: Interferometric distance measuring method for measuring surfaces, and such a measuring arrangement
-
Application No.: US14129044Application Date: 2012-06-25
-
Publication No.: US09677870B2Publication Date: 2017-06-13
- Inventor: Thomas Jensen
- Applicant: Thomas Jensen
- Applicant Address: CH Heerbrugg
- Assignee: HEXAGON TECHNOLOGY CENTER GMBH
- Current Assignee: HEXAGON TECHNOLOGY CENTER GMBH
- Current Assignee Address: CH Heerbrugg
- Agency: Maschoff Brennan
- Priority: EP11171582 20110627
- International Application: PCT/EP2012/062246 WO 20120625
- International Announcement: WO2013/000866 WO 20130103
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01B9/02

Abstract:
A distance measuring method for measuring surfaces uses a laser source having a frequency that can be modulated to tune a wavelength of a laser beam in a wavelength range. The laser beam is generated with a coherence length to provide a measuring beam and is emitted at the surface, located within a specified distance range, as a measuring beam. The measuring beam is back-scattered by the surface and is received again and used to interferometrically measure the distance from a reference point to the surface. The specified distance range lies at least partly outside of the coherence length. One portion of the laser beam is temporally delayed with respect to another portion, such that the one optical path difference caused by the delay matches the optical path difference that corresponds to a distance in the specified distance range plus or minus the coherence length of the laser.
Public/Granted literature
- US20140139846A1 INTERFEROMETRIC DISTANCE MEASURING METHOD FOR MEASURING SURFACES, AND SUCH A MEASURING ARRANGEMENT Public/Granted day:2014-05-22
Information query