- 专利标题: Digital exposure device
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申请号: US14169215申请日: 2014-01-31
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公开(公告)号: US09684164B2公开(公告)日: 2017-06-20
- 发明人: Changhoon Kim , Sanghyun Yun , Hikuk Lee , Jaehyuk Chang , Cha-Dong Kim , Kibeom Lee
- 申请人: SAMSUNG DISPLAY CO., LTD.
- 申请人地址: KR Yongin, Gyeonggi-Do
- 专利权人: SAMSUNG DISPLAY CO., LTD.
- 当前专利权人: SAMSUNG DISPLAY CO., LTD.
- 当前专利权人地址: KR Yongin, Gyeonggi-Do
- 代理机构: F. Chau & Associates, LLC
- 优先权: KR10-2013-0084833 20130718
- 主分类号: G06F19/00
- IPC分类号: G06F19/00 ; G02B26/08 ; G03F7/20
摘要:
A digital exposure device includes: a stage having a substrate seated thereon where a pattern is to be formed and moving in a scan direction; a data modification unit receiving design data and generating modified data by extending the design data; and a digital exposure unit receiving the design data and projecting a light controlled according to the design data on the substrate, wherein the modified data includes intermedial data corresponding to the size difference between an image of the design data and an image of the modified data and some of unit data forming the intermedial data are data obtained when unit data of the design data are shifted in any expansion direction.
公开/授权文献
- US20150025665A1 DIGITAL EXPOSURE DEVICE 公开/授权日:2015-01-22
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