Invention Grant
- Patent Title: Array substrate, method for manufacturing the same and liquid crystal display device
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Application No.: US14771694Application Date: 2015-01-04
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Publication No.: US09684217B2Publication Date: 2017-06-20
- Inventor: Xiang Liu
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: CN201410486673 20140922
- International Application: PCT/CN2015/070024 WO 20150104
- International Announcement: WO2016/045238 WO 20160331
- Main IPC: G02F1/1368
- IPC: G02F1/1368 ; H01L21/467 ; H01L27/12 ; G02F1/1362 ; H01L29/786 ; H01L21/77

Abstract:
An array substrate, a method for manufacturing the same and a liquid crystal display device are provided. A metal oxide semiconductor layer and an etching stop layer are sequentially formed on a gate insulating layer. One patterning process is performed in the etching stop layer to form a source electrode contact region via hole, a drain electrode contact region via hole and an insulation region. A source-drain electrode layer is formed on the etching stop layer. During a process of performing one patterning process in the source-drain electrode layer to form a source-drain electrode pattern, a portion of the metal oxide semiconductor layer corresponding to the insulation region is removed so that the metal oxide semiconductor layer is disconnected at a position corresponding to the insulation region. The insulation region surrounds the source-drain electrode pattern.
Public/Granted literature
- US20170003529A1 ARRAY SUBSTRATE, METHOD FOR MANUFACTURING THE SAME AND LIQUID CRYSTAL DISPLAY DEVICE Public/Granted day:2017-01-05
Information query
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