- 专利标题: Fuse/resistor utilizing interconnect and vias and method of making
-
申请号: US13907497申请日: 2013-05-31
-
公开(公告)号: US09685405B2公开(公告)日: 2017-06-20
- 发明人: Mehul D. Shroff , Douglas M. Reber , Edward O. Travis
- 申请人: Mehul D. Shroff , Douglas M. Reber , Edward O. Travis
- 申请人地址: US TX Austin
- 专利权人: NXP USA, INC.
- 当前专利权人: NXP USA, INC.
- 当前专利权人地址: US TX Austin
- 主分类号: H01L23/525
- IPC分类号: H01L23/525 ; H01L23/522 ; H01L49/02
摘要:
A semiconductor structure comprising a fuse/resistor structure over a functional layer having a substrate. The fuse/resistor structure includes a via, a first interconnect layer, and a second interconnect layer. The via is over the functional layer and has a first end and a second end vertically opposite the first end, wherein the first end is bounded by a first edge and a second edge opposite the first edge and the second end is bounded by a third edge and a fourth edge opposite the third edge. The first interconnect layer includes a first metal layer running horizontally and contacting the first end and completely extending from the first edge to the second edge. The second interconnect layer includes a second metal layer running horizontally and contacting the second end of the via and extending past the third edge but reaching less than half way to the fourth edge.
公开/授权文献
信息查询
IPC分类: