Invention Grant
- Patent Title: Glass wafer assembly
-
Application No.: US14718408Application Date: 2015-05-21
-
Publication No.: US09688529B2Publication Date: 2017-06-27
- Inventor: Jan Edward Vandemeer , Jonathan Hale Hammond
- Applicant: RF Micro Devices, Inc.
- Applicant Address: US NC Greensboro
- Assignee: Qorvo US, Inc.
- Current Assignee: Qorvo US, Inc.
- Current Assignee Address: US NC Greensboro
- Agency: Withrow & Terranova, P.L.L.C.
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81B7/00 ; B81C1/00

Abstract:
A glass wafer assembly is disclosed. In one aspect, the glass wafer assembly comprises a first glass wafer and a second glass wafer that are bonded by a conductive sealing ring. The conductive sealing ring defines a substantially hermetically sealed cavity between the first glass wafer and the second glass wafer. In another aspect, the first glass wafer and the second glass wafer each comprise a plurality of conductive through glass vias (TGVs). At least one active device is disposed in the substantially hermetically sealed cavity and can be electrically coupled to a conductive TGV in the first glass wafer and a conductive TGV in the second glass wafer to enable flexible electrical routing through the glass wafer assembly without wire bonding and over molding. As a result, it is possible to reduce footprint and height while improving radio frequency (RF) performance of the glass wafer assembly.
Public/Granted literature
- US20150353348A1 GLASS WAFER ASSEMBLY Public/Granted day:2015-12-10
Information query