- 专利标题： Substrate transfer robot with chamber and substrate monitoring capability
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申请号： US12890281申请日： 2010-09-24
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公开(公告)号： US09691650B2公开(公告)日： 2017-06-27
- 发明人: Shinichi Kurita , Takayuki Matsumoto , Suhail Anwar , Makoto Inagawa
- 申请人： Shinichi Kurita , Takayuki Matsumoto , Suhail Anwar , Makoto Inagawa
- 申请人地址： US CA Santa Clara
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Patterson + Sheridan, LLP
- 主分类号： H01L21/677
- IPC分类号： H01L21/677 ; H01L21/67
摘要：
A method and apparatus for a transfer robot that having at least one image sensor disposed thereon is provided. The transfer robot includes a lift assembly having a first drive assembly for moving a first platform relative to a second platform in a first linear direction, an end effector assembly disposed on the second platform and movable in a second linear direction by a second drive assembly, the second linear direction being orthogonal to the first linear direction, at least one image sensor, and a lighting device associated with the at least one image sensor.
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