Invention Grant
- Patent Title: Simultaneous refractive index and thickness measurements with a monochromatic low-coherence interferometer
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Application No.: US14236613Application Date: 2012-07-31
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Publication No.: US09696138B2Publication Date: 2017-07-04
- Inventor: Xiaoke Wan , Jian Ge
- Applicant: Xiaoke Wan , Jian Ge
- Applicant Address: US FL Gainesville
- Assignee: University of Florida Research Foundation, Inc.
- Current Assignee: University of Florida Research Foundation, Inc.
- Current Assignee Address: US FL Gainesville
- Agency: Miles & Stockbridge P.C.
- Agent David R. Schaffer
- International Application: PCT/US2012/048940 WO 20120731
- International Announcement: WO2013/019776 WO 20130207
- Main IPC: G01N21/45
- IPC: G01N21/45 ; G01B11/06 ; G01B9/02

Abstract:
A scanning monochromatic spatial low-coherent interferometer (S-LCI) can be used to simultaneously measure geometric thickness and refractive index. The probe beam of the scanning S-LCI can be an off-axis converging single wavelength laser beam, and the decomposed incident angles of the beam on the sample can be accurately defined in the Fourier domain. The angle dependent phase shift of a plane parallel plate or other sample can be obtained in a single system measurement. From the angle dependent phase shift, the geometric thickness and refractive index of the sample can be simultaneously obtained. Additionally or alternatively, the S-LCI system can interrogate the sample to profile the location and refractive index of one or more layers within the sample using the disclosed techniques.
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