- 专利标题: Laser processing apparatus
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申请号: US13784724申请日: 2013-03-04
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公开(公告)号: US09700960B2公开(公告)日: 2017-07-11
- 发明人: Il-Young Jeong , Gyoo-Wan Han , Jun-Hyung Kim
- 申请人: SAMSUNG DISPLAY CO., LTD.
- 申请人地址: KR Yongin-si
- 专利权人: Samsung Display Co., Ltd.
- 当前专利权人: Samsung Display Co., Ltd.
- 当前专利权人地址: KR Yongin-si
- 代理机构: Lewis Roca Rothgerber Christie LLP
- 优先权: KR10-2012-0112663 20121010
- 主分类号: B23K26/142
- IPC分类号: B23K26/142 ; B23K26/362
摘要:
A laser processing apparatus using a laser. The laser processing apparatus includes a light source for generating a hollow laser beam in a first direction; a reflection member for changing a path of the hollow laser beam toward the first direction into a second direction toward the substrate; a lens for collecting the hollow laser beam reflected by the reflection member; and an air supply unit for supplying air toward particles generated while the substrate is processed by the hollow laser beam, wherein the lens has a first hole passing through the lens, the reflection member has a second hole passing through the reflection member, and the first and second holes form a discharge path of the particles.
公开/授权文献
- US20140097162A1 LASER PROCESSING APPARATUS 公开/授权日:2014-04-10
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