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公开(公告)号：US09700960B2
公开(公告)日：2017-07-11
申请号：US13784724
申请日：2013-03-04
发明人： Il-Young Jeong , Gyoo-Wan Han , Jun-Hyung Kim
IPC分类号： B23K26/142 , B23K26/362
CPC分类号： B23K26/142 , B23K26/361 , B23K26/362
摘要： A laser processing apparatus using a laser. The laser processing apparatus includes a light source for generating a hollow laser beam in a first direction; a reflection member for changing a path of the hollow laser beam toward the first direction into a second direction toward the substrate; a lens for collecting the hollow laser beam reflected by the reflection member; and an air supply unit for supplying air toward particles generated while the substrate is processed by the hollow laser beam, wherein the lens has a first hole passing through the lens, the reflection member has a second hole passing through the reflection member, and the first and second holes form a discharge path of the particles.
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公开(公告)号：US20140097162A1
公开(公告)日：2014-04-10
申请号：US13784724
申请日：2013-03-04
发明人： Il-Young Jeong , Gyoo-Wan Han , Jun-Hyung Kim
CPC分类号： B23K26/142 , B23K26/361 , B23K26/362
摘要： A laser processing apparatus using a laser. The laser processing apparatus includes a light source for generating a hollow laser beam in a first direction; a reflection member for changing a path of the hollow laser beam toward the first direction into a second direction toward the substrate; a lens for collecting the hollow laser beam reflected by the reflection member; and an air supply unit for supplying air toward particles generated while the substrate is processed by the hollow laser beam, wherein the lens has a first hole passing through the lens, the reflection member has a second hole passing through the reflection member, and the first and second holes form a discharge path of the particles.
摘要翻译： 一种使用激光的激光加工装置。 激光加工装置包括：用于沿第一方向产生中空激光束的光源; 反射构件，用于将所述中空激光束朝向所述第一方向的路径改变为朝向所述衬底的第二方向; 用于收集由反射构件反射的中空激光束的透镜; 以及空气供给单元，用于向由所述中空激光束处理所述基板时产生的颗粒供给空气，其中，所述透镜具有穿过所述透镜的第一孔，所述反射构件具有穿过所述反射构件的第二孔，并且所述第一 并且第二孔形成颗粒的排出路径。
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