Invention Grant
- Patent Title: Manganese tin oxide based transparent conducting oxide and transparent conductive film and method for fabricating transparent conductive film using the same
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Application No.: US15014937Application Date: 2016-02-03
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Publication No.: US09704610B2Publication Date: 2017-07-11
- Inventor: Ji-Won Choi , Won-Kook Choi , Jin Sang Kim , Haena Yim
- Applicant: Korea Institute of Science and Technology
- Applicant Address: KR Seoul
- Assignee: Korea Institute of Science and Technology
- Current Assignee: Korea Institute of Science and Technology
- Current Assignee Address: KR Seoul
- Agency: NSIP Law
- Priority: KR10-2015-0017286 20150204
- Main IPC: B32B15/04
- IPC: B32B15/04 ; C23C14/06 ; H01B1/02 ; H01L29/43 ; H01L31/0224 ; C01G19/02 ; H01L31/18 ; H01L33/42
Abstract:
Disclosed is a manganese tin oxide-based transparent conducting oxide (TCO) with an optimized composition, which has low surface roughness, low sheet resistance and high transmittance even when deposited at room temperature, a multilayer transparent conductive film using the same and a method for fabricating the same. The manganese tin oxide-based transparent conducting oxide has a composition of MnxSn1-xO (0
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