公开(公告)号：US09704610B2

公开(公告)日：2017-07-11

申请号：US15014937

申请日：2016-02-03

Applicant: Korea Institute of Science and Technology

Inventor： Ji-Won Choi ,  Won-Kook Choi ,  Jin Sang Kim ,  Haena Yim

IPC: B32B15/04 ,  C23C14/06 ,  H01B1/02 ,  H01L29/43 ,  H01L31/0224 ,  C01G19/02 ,  H01L31/18 ,  H01L33/42

CPC classification number: H01B1/02 ,  C01G19/02 ,  C01P2002/50 ,  C01P2002/54 ,  H01L29/43 ,  H01L31/022466 ,  H01L31/1884 ,  H01L33/42 ,  Y02E10/50

Abstract: Disclosed is a manganese tin oxide-based transparent conducting oxide (TCO) with an optimized composition, which has low surface roughness, low sheet resistance and high transmittance even when deposited at room temperature, a multilayer transparent conductive film using the same and a method for fabricating the same. The manganese tin oxide-based transparent conducting oxide has a composition of MnxSn1-xO (0