Invention Grant
- Patent Title: Methods of predicting unity gain frequency with direct current and/or low frequency parameters
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Application No.: US14146143Application Date: 2014-01-02
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Publication No.: US09704763B2Publication Date: 2017-07-11
- Inventor: Amit A. Dikshit , Tamilmani Ethirajan , Shrinivas J. Pandharpure , Vaidyanathan T. Subramanian , Josef S. Watts
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Michael LeStrange
- Main IPC: H01L21/84
- IPC: H01L21/84 ; H01L21/66 ; G06F17/50 ; G01R31/26

Abstract:
Various embodiments include approaches for predicting unity gain frequency in a MOSFET. In some cases, a method includes predicting a unity gain frequency (fT) in a MOSFET device in a manufacturing line, the method including: measuring a first set of in-line direct current (DC) parameters of the MOSFET on the manufacturing line at a first drain voltage (Vd1); extracting a transconductance (Gm) from the first set of in-line DC parameters as a function of a gate-voltage (Vg) and the first drain-voltage (Vd1); measuring a second set of in-line DC parameters of the MOSFET on the manufacturing line at a second drain voltage (Vd2); extracting a total gate capacitance (Cgg) from the second set of in-line DC parameters as a function of the gate-voltage (Vg); and predicting the unity gain frequency (fT) of the MOSFET based upon the extracted transconductance (Gm) and the extracted total gate capacitance (Cgg).
Public/Granted literature
- US20150187665A1 METHODS OF PREDICTING UNITY GAIN FREQUENCY WITH DIRECT CURRENT AND/OR LOW FREQUENCY PARAMETERS Public/Granted day:2015-07-02
Information query
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