Invention Grant
- Patent Title: Circuit probe for charged particle beam system
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Application No.: US14460161Application Date: 2014-08-14
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Publication No.: US09709600B2Publication Date: 2017-07-18
- Inventor: Paul Johannes L. Barends , Mathijs P. W. van den Boogaard , Philip Brundage
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, P.C.
- Agent Michael O. Scheinberg
- Main IPC: G01R1/067
- IPC: G01R1/067 ; H01J37/20

Abstract:
A probe assembly can be connected and disconnected from its electrical harness within a vacuum chamber so that the probe assembly with the work piece mounted can be rotated and tilted without interference from a cable, and can then be reconnected without opening the vacuum chamber. Also described is a means of grounding a sample and probes when the probe assembly is disconnected from its electrical harness and a means of preventing damage to the probe mechanism and the probe itself by ensuring that the probes are not sticking up too far during operations.
Public/Granted literature
- US20150048815A1 Circuit Probe for Charged Particle Beam System Public/Granted day:2015-02-19
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