发明授权
- 专利标题: Methods for direct measurement of pitch-walking in lithographic multiple patterning
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申请号: US15074235申请日: 2016-03-18
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公开(公告)号: US09711624B1公开(公告)日: 2017-07-18
- 发明人: Fang Fang , Daniel Jaeger
- 申请人: GLOBALFOUNDRIES Inc.
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Ditthavong & Steiner, P.C.
- 主分类号: H01L23/58
- IPC分类号: H01L23/58 ; H01L29/66 ; H01L21/66 ; H01L21/3065 ; H01L21/308 ; H01L29/78
摘要:
Methods and apparatus for measuring pitch-walking are disclosed. Embodiments include forming parallel, spaced mandrels in test sites on a substrate; performing two SIT processes, forming first-fourth fins in the substrate for each mandrel; designating spaces between first and second and between third and fourth fins as β, between first and fourth fins of adjacent mandrels as α, and between second and third fins as γ in each test site; applying a first lithomask over fins at a first test site selecting spaces designated as one of α, β, or γ and the adjacent fins; applying a second lithomask over fins at a second test site selecting second spaces, designated as a different one of α, β, or γ and the adjacent fins; measuring the selected first and second spaces; determining differences between the measured first and second spaces; and adjusting processes for forming fins based on the differences.
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