Invention Grant
- Patent Title: MEMS acoustic sensor comprising a non-perimeter flexible member
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Application No.: US14642693Application Date: 2015-03-09
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Publication No.: US09718671B2Publication Date: 2017-08-01
- Inventor: Sushil Bharatan , Baris Cagdaser
- Applicant: INVENSENSE, INC.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: G01L9/00
- IPC: G01L9/00 ; B81B3/00 ; B81C1/00

Abstract:
A micro electro-mechanical system (MEMS) acoustic sensor is disclosed. The acoustic sensor comprises a backplate and a diaphragm. The acoustic sensor further comprises a flexible member and optional spacer member disposed between the backplate and the diaphragm resulting in a gap between the backplate and the diaphragm. The gap can vary in response to impinging pressure on the diaphragm based on the design of the flexible member and resulting in a variable capacitance between the backplate and the diaphragm. The change in the gap can result in a change in an electrical characteristic associated with the variable capacitance and can be converted to an electrical output signal corresponding to the impinging pressure on the diaphragm. The flexible member can be part of the backplate or diaphragm.
Public/Granted literature
- US20160264398A1 MEMS ACOUSTIC SENSOR COMPRISING A NON-PERIMETER FLEXIBLE MEMBER Public/Granted day:2016-09-15
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