Invention Grant
- Patent Title: Integrated circuit and manufacturing method thereof
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Application No.: US15060612Application Date: 2016-03-04
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Publication No.: US09721883B1Publication Date: 2017-08-01
- Inventor: Wen-Lung Lai , Chen-Chieh Chiang , Chi-Cherng Jeng , Shiu-Ko JangJian
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L23/522 ; H01L23/528 ; H01L21/683 ; H01L21/768

Abstract:
Integrated circuits and manufacturing methods of the same are disclosed. The integrated circuit includes a transistor, a first dielectric layer, an etch stop layer, a first via and a first conductive layer. The first dielectric layer is disposed between the transistor and the etch stop layer. The first via is disposed in the first dielectric layer and the etch stop layer, and electrically connected to the transistor. The first conductive layer is in contact with the first via, wherein the first via is disposed between the first conductive layer and the transistor, and the etch stop layer is aside a portion of the first via adjacent to the first conductive layer.
Information query
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