Invention Grant
- Patent Title: Manufacturing method of high-voltage metal-oxide-semiconductor transistor
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Application No.: US15173728Application Date: 2016-06-06
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Publication No.: US09722072B2Publication Date: 2017-08-01
- Inventor: Kai-Kuen Chang , Chia-Min Hung , Shih-Yin Hsiao
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/40 ; H01L29/66 ; H01L29/06 ; H01L29/10 ; H01L29/423

Abstract:
A manufacturing method of a high-voltage metal-oxide-semiconductor (HV MOS) transistor device is provided. The manufacturing method includes the following steps. A semiconductor substrate is provided. A patterned conductive structure is formed on the semiconductor substrate. The patterned conductive structure includes a gate structure and a first sub-gate structure. The semiconductor substrate has a first region and a second region respectively disposed on two opposite sides of the gate structure. The first sub-gate structure is disposed on the first region of the semiconductor substrate. The first sub-gate structure is separated from the gate structure. A drain region is formed in the first region of the semiconductor substrate. A first contact structure is formed on the drain region and the first sub-gate structure. The drain region is electrically connected to the first sub-gate structure via the first contact structure.
Public/Granted literature
- US20170025531A1 MANUFACTURING METHOD OF HIGH-VOLTAGE METAL-OXIDE-SEMICONDUCTOR TRANSISTOR Public/Granted day:2017-01-26
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