Invention Grant
- Patent Title: Plasma processing apparatus
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Application No.: US13119106Application Date: 2009-09-03
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Publication No.: US09728379B2Publication Date: 2017-08-08
- Inventor: Fenggang Zhang
- Applicant: Fenggang Zhang
- Applicant Address: CN Beijing
- Assignee: Beijing NMC Co., Ltd.
- Current Assignee: Beijing NMC Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: Locke Lord LLP
- Agent Howard M. Gitten
- Priority: CN200810222421 20080916
- International Application: PCT/CN2009/073714 WO 20090903
- International Announcement: WO2010/031307 WO 20100325
- Main IPC: C23C14/50
- IPC: C23C14/50 ; H01L21/67 ; H01J37/32 ; H01L21/683 ; H01L21/687

Abstract:
A plasma processing apparatus (5) comprises an outer shell (51) which is provided with a reaction chamber (52) in the interior, a bottom electrode which is arranged in the reaction chamber (52) and a cantilever support device (53) which goes through the outer shell (51) and supports the bottom electrode. The cantilever support device (53) is pivotally mounted on the side wall of the outer shell (51) and can rotate in the outer shell (51). The plasma processing apparatus (5) further comprises a locating device so as to selectively fix the relative position of the cantilever support device (53) and the outer shell (51).
Public/Granted literature
- US20110162801A1 PLASMA PROCESSING APPARATUS Public/Granted day:2011-07-07
Information query
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