Invention Grant
- Patent Title: High-voltage metal-oxide-semiconductor transistor device and manufacturing method thereof
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Application No.: US14922209Application Date: 2015-10-26
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Publication No.: US09728616B2Publication Date: 2017-08-08
- Inventor: Shih-Yin Hsiao , Kai-Kuen Chang
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: CN201510585089 20150915
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/78 ; H01L29/66

Abstract:
The present invention provides a high-voltage metal-oxide-semiconductor transistor device and a manufacturing method thereof. First, a semiconductor substrate is provided and a dielectric layer and a conductive layer sequentially stacked on the semiconductor substrate. Then, the conductive layer is patterned to form a gate and a dummy gate disposed at a first side of the gate and followed by forming a first spacer between the gate and the dummy gate and a second spacer at a second side of the gate opposite to the first side, wherein the first spacer includes an indentation. Subsequently, the dummy gate is removed.
Public/Granted literature
- US20170077250A1 HIGH-VOLTAGE METAL-OXIDE-SEMICONDUCTOR TRANSISTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2017-03-16
Information query
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