Invention Grant
- Patent Title: System and method for characterizing focused charged beams
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Application No.: US14397478Application Date: 2013-04-16
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Publication No.: US09733366B2Publication Date: 2017-08-15
- Inventor: Sudeep Bhattacharjee , Samit Paul
- Applicant: INDIAN INSTITUTE OF TECHNOLOGY KANPUR
- Applicant Address: IN Kanpur
- Assignee: INDIAN INSTITUTE OF TECHNOLOGY KANPUR
- Current Assignee: INDIAN INSTITUTE OF TECHNOLOGY KANPUR
- Current Assignee Address: IN Kanpur
- Agency: Turk IP Law, LLC
- Priority: IN1301/DEL/2012 20120427
- International Application: PCT/IB2013/053011 WO 20130416
- International Announcement: WO2013/160800 WO 20131031
- Main IPC: G01T1/29
- IPC: G01T1/29 ; H01J37/244 ; H01J37/30
Abstract:
An apparatus for characterizing a focused charged beam is provided. The apparatus includes a plurality of parallel conducting channels and at least one current sensing unit configured to measure current across each of the plurality of parallel conducting channels.
Public/Granted literature
- US20150041667A1 SYSTEM AND METHOD FOR CHARACTERIZING FOCUSED CHARGED BEAMS Public/Granted day:2015-02-12
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