Invention Grant
- Patent Title: Controlling opening angle of a resonating mirror
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Application No.: US14937155Application Date: 2015-11-10
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Publication No.: US09740002B2Publication Date: 2017-08-22
- Inventor: Mark Kolodkin
- Applicant: STMicroelectronics International N.V.
- Applicant Address: IL Netanya
- Assignee: STMicroelectronics Ltd
- Current Assignee: STMicroelectronics Ltd
- Current Assignee Address: IL Netanya
- Agency: Gardere Wynne Sewell LLP
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
A device described herein includes a movable MEMS mirror, with a driver configured to drive the movable MEMS mirror with a periodic signal such that the MEMS mirror oscillates at its resonance frequency. A feedback measuring circuit is configured to measure a signal flowing through the movable MEMS mirror. A processor is configured to sample the signal at first and second instants, generate an error signal as a function of a difference between the signal at the first instant in time and the signal at the second instant in time, and determine the opening angle of the movable MEMS mirror as a function of the error signal.
Public/Granted literature
- US20170131540A1 CONTROLLING OPENING ANGLE OF A RESONATING MIRROR Public/Granted day:2017-05-11
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