公开(公告)号：US09740002B2

公开(公告)日：2017-08-22

申请号：US14937155

申请日：2015-11-10

Applicant: STMicroelectronics International N.V.

Inventor： Mark Kolodkin

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  G02B26/085

Abstract: A device described herein includes a movable MEMS mirror, with a driver configured to drive the movable MEMS mirror with a periodic signal such that the MEMS mirror oscillates at its resonance frequency. A feedback measuring circuit is configured to measure a signal flowing through the movable MEMS mirror. A processor is configured to sample the signal at first and second instants, generate an error signal as a function of a difference between the signal at the first instant in time and the signal at the second instant in time, and determine the opening angle of the movable MEMS mirror as a function of the error signal.

公开(公告)号：US20170131540A1

公开(公告)日：2017-05-11

申请号：US14937155

申请日：2015-11-10

Applicant: STMicroelectronics International N.V.

Inventor： Mark Kolodkin

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  G02B26/085

Abstract: A device described herein includes a movable MEMS mirror, with a driver configured to drive the movable MEMS mirror with a periodic signal such that the MEMS mirror oscillates at its resonance frequency. A feedback measuring circuit is configured to measure a signal flowing through the movable MEMS mirror. A processor is configured to sample the signal at first and second instants, generate an error signal as a function of a difference between the signal at the first instant in time and the signal at the second instant in time, and determine the opening angle of the movable MEMS mirror as a function of the error signal.