Invention Grant
- Patent Title: Charged particle optical apparatus having a selectively positionable differential pressure module
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Application No.: US14724681Application Date: 2015-05-28
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Publication No.: US09741528B2Publication Date: 2017-08-22
- Inventor: Michael Albiez , Stefan Meyer , Daniel Kirsten , Stewart Bean , Erik Essers
- Applicant: Carl Zeiss Microscopy GmbH
- Applicant Address: DE Jena
- Assignee: CARL ZEISS MICROSCOPY GMBH
- Current Assignee: CARL ZEISS MICROSCOPY GMBH
- Current Assignee Address: DE Jena
- Agency: Alston & Bird LLP
- Priority: EP14001865 20140528
- Main IPC: H01J37/18
- IPC: H01J37/18 ; H01J37/244 ; H01J37/28

Abstract:
Disclosed is a charged particle optical apparatus, which includes a particle optical arrangement, configured to define a particle beam path for inspecting an object. The object is accommodated in a pressure-controlled interior of a specimen chamber during the inspection of the object. The charged particle optical apparatus further includes a differential pressure module having a differential pressure aperture. A positioning arm is arranged in the specimen chamber for selectively position the differential pressure module within the pressure-controlled interior of the specimen chamber into an operating position in which the particle beam path passes through the differential pressure aperture. The selective positioning includes an advancing movement of the differential pressure module toward the primary particle beam path. The advancing movement is transmitted to the differential pressure module by a track-guided movement of the positioning arm.
Public/Granted literature
- US20150348742A1 CHARGED PARTICLE OPTICAL APPARATUS HAVING A SELECTIVELY POSITIONABLE DIFFERENTIAL PRESSURE MODULE Public/Granted day:2015-12-03
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