A method for producing self-aligned line end vias and the resulting device are provided. Embodiments include forming trenches in a dielectric layer; filling the trenches with a sacrificial layer; forming and etching a block mask over sacrificial layers to form a cut area over a portion of the trenches; forming spacers at sides of the cut area; removing the sacrificial layer from the portion of the trenches; forming a mask in the cut area and the portion of trenches, the mask selected from a HDP oxide, SiC or SiCNH; selectively etching the spacers; and selectively etching the sacrificial layer and the dielectric layer by RIE to form SAVs.