Invention Grant
- Patent Title: Method and structure to form tensile strained SiGe fins and compressive strained SiGe fins on a same substrate
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Application No.: US14729845Application Date: 2015-06-03
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Publication No.: US09754941B2Publication Date: 2017-09-05
- Inventor: Kangguo Cheng , Ali Khakifirooz , Alexander Reznicek , Dominic J. Schepis
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Main IPC: H01L21/18
- IPC: H01L21/18 ; H01L27/092 ; H01L21/8238 ; H01L21/84 ; H01L29/78 ; H01L27/12 ; H01L29/161

Abstract:
A method of forming a semiconductor structure that includes compressive strained silicon germanium alloy fins having a first germanium content and tensile strained silicon germanium alloy fins having a second germanium content that is less than the first germanium content is provided. The different strained and germanium content silicon germanium alloy fins are located on a same substrate. The method includes forming a cladding layer of silicon around a set of the silicon germanium alloy fins, and forming a cladding layer of a germanium containing material around another set of the silicon germanium alloy fins. Thermal mixing is then employed to form the different strained and germanium content silicon germanium alloy fins.
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